Plasma processing method
AssigneeHitachi High-Technologies Corporation
InventorsMasatoshi Miyake, Kenji Maeda, Kenetsu Yokogawa, Masaru Izawa
Life of this patent
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Abstract
A plasma processing method includes etching an insulating film of a sample to be processed using plasma generated from etching gas, supplying a large flow of inert gas from above the sample while having the sample mounted on a sample mounting stage, supplying deposit removal gas to only an area near a side wall of a processing chamber, and controlling a plasma density distribution to thereby vary a plasma density at a center area of the processing chamber and a plasma density at an area near the side wall of the processing chamber so as to perform a deposited film removing process for removing the film deposited on the side wall of the processing chamber.
Claims11
A plasma processing method using a plasma processing apparatus comprising a processing chamber, a gas supply means for supplying processing gas independently to a center area of the processing chamber and to an area near the side wall thereof;
- an evacuation means for depressurizing the processing chamber;
- a sample mounting stage for mounting a sample to be processed;
- a high frequency power supply for generating plasma;
- an antenna for supplying a plasma-generating high frequency power to the processing chamber;
- and a plasma generating means for generating plasma in the processing chamber;
- the method comprising:
- etching an insulating film of the sample to be processed using plasma generated from etching gas;
- and
- supplying a large flow of inert gas from above the sample while having the sample mounted on the sample mounting stage, supplying deposit removal gas to only the area near the side wall of the processing chamber, and controlling the plasma density distribution to thereby vary the plasma density at the center area of the processing chamber and the plasma density at the area near the sidewall of the processing chamber to perform a deposited film removing process for removing the film deposited on the side wall of the processing chamber.
Dependencies are inferred from the claim text.