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US 7,842,534 B2Granted
Method for forming a compound semi-conductor thin-film
AssigneeSunlight Photonics Inc.
InventorsAllan James Bruce, Sergey Frolov, Michael Cyrus
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Abstract
A method is provided for fabricating a thin film semiconductor device. The method includes providing a plurality of raw semiconductor materials. The raw semiconductor materials undergo a pre-reacting process to form a homogeneous compound semiconductor target material. The compound semiconductor target material is deposited onto a substrate to form a thin film having a composition substantially the same as a composition of the compound semiconductor target material.
Claims17
A method of fabricating a thin-film semiconductor device, comprising:
- providing a plurality of raw semiconductor materials;
- pre-reacting the raw semiconductor materials to form a homogeneous compound semiconductor target material;
- and
- depositing the compound semiconductor target material onto a substrate to form a thin-film having a composition substantially the same as a composition of the compound semiconductor target material.
1 more element
Dependencies are inferred from the claim text.