Method for manufacturing protective layer
AssigneePanasonic Corporation
InventorsYoshinao Ooe, Kazuo Uetani, Akira Shiokawa, Kaname Mizokami, Hiroyuki Kado
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Abstract
A method for manufacturing a protective layer such that when the protective layer is formed in a film-forming chamber, the partial pressure of water in the film-forming chamber is controlled by the exhaust velocity of the water in the film-forming chamber. During formation of the protective layer the total pressure in the film-forming chamber is kept constant. In addition, the partial pressure of the water in the film-forming chamber is controlled while introducing a gas into the film-forming chamber, thereby controlling the ratio of the partial pressure of hydrogen to the partial pressure of oxygen in the film-forming chamber.
Claims2
A method for manufacturing a protective layer, wherein
- when the protective layer is formed in a film-forming chamber, a partial pressure of water in the film-forming chamber is controlled by an exhaust velocity of the water in the film-forming chamber, with a total pressure in the film-forming chamber kept constant;
- wherein the partial pressure of the water in the film-forming chamber is controlled while introducing at least oxygen into the film-forming chamber, thereby controlling a ratio of a partial pressure of hydrogen to a partial pressure of oxygen in the film-forming chamber.
Dependencies are inferred from the claim text.