Method of nano-patterning block copolymers and method of manufacturing polarizer and color filter using the same
AssigneesSamsung Electronics Co., Ltd., Korea Advanced Institute of Science and Technology
InventorsSang-ouk Kim, Su-mi Lee, Moon-gyu Lee, Bong-hoon Kim, Dong-ok Shin
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Abstract
Provided is a method of nano-patterning block copolymers and a method of manufacturing a polarizer using the same. The method of nano-patterning block copolymers includes coating block copolymers on a lower substrate to a predetermined thickness, forming a thickness gradient by patterning the block copolymers to have a predetermined aspect ratio, and aligning self-assembled block copolymers in a direction of the thickness gradient by heat-treating the block copolymers having the thickness gradient.
Claims32
A method of nano-patterning block copolymers, the method comprising:
- (a) coating block copolymers on a lower substrate to a predetermined thickness;
- (b) forming a thickness gradient by patterning the block copolymers to have a predetermined aspect ratio;
- and
- (c) aligning self-assembled block copolymers in a direction of the thickness gradient by heat-treating the block copolymers having the thickness gradient.
A method of nano-patterning block copolymers, the method comprising:
- (a) coating a sacrificial layer on a lower substrate;
- (b) patterning a plurality of barrier ribs and channels on the sacrificial layer using a photomask;
- (c) forming a plurality of barrier ribs and channels by etching the sacrificial layer;
- (d) forming a hydrophobic layer to surround the plurality of the barrier ribs;
- (e) forming a thickness gradient by filling block copolymers in the plurality of channels to have a predetermined aspect ratio;
- and
- (f) aligning self-assembled block copolymers in a direction of the thickness gradient by heat-treating the block copolymers having the thickness gradient.
A method of manufacturing a polarizer, the method comprising:
- (a) coating block copolymers including a block combined with a metal on a substrate;
- (b) forming a thickness gradient by patterning the block copolymers to have a predetermined aspect ratio;
- (c) aligning self-assembled block copolymers in a direction of the thickness gradient by heat-treating the block copolymers having the thickness gradient;
- and
- (d) removing blocks other than the block combined with particles of the metal.
A method of manufacturing a polarizer, the method comprising:
- (a) coating block copolymers in which at least two blocks are combined on a substrate;
- (b) forming a thickness gradient by patterning the block copolymers to have a predetermined aspect ratio;
- (c) aligning self-assembled block copolymers in a direction of the thickness gradient by heat-treating the block copolymers having the thickness gradient;
- (d) removing one of the blocks included in the block copolymers;
- (e) coating a metal material layer to a predetermined thickness on the block copolymers from which one of the blocks was removed;
- (f) patterning the metal material layer using a lift off process;
- and
- (g) removing the other blocks.
A method of manufacturing a polarizer, the method comprising:
- (a) coating block copolymers in which at least two blocks are combined on a substrate;
- (b) forming a thickness gradient by patterning the block copolymers to have a predetermined aspect ratio;
- (c) aligning self-assembled block copolymers in a direction of the thickness gradient by heat-treating the block copolymers having the thickness gradient;
- (d) removing one of the blocks included in the block copolymers;
- and
- (e) electroplating a portion from which the block was removed.
A method of manufacturing a color filter, the method comprising:
- (a) forming black matrixes on a substrate;
- (b) forming a hydrophobic layer to surround the black matrixes;
- (c) forming a thickness gradient to have a predetermined aspect ratio by filling block copolymers in space defined by the black matrixes;
- (d) aligning self-assembled block copolymers in a direction of the thickness gradient by heat-treating the block copolymers having the thickness gradient;
- (f) removing one of the blocks included in the block copolymers and forming a polarizer;
- and
- (g) filling a color ink in the space in which the polarizer is formed.
Dependencies are inferred from the claim text.