Manufacturing method by treating substrate introduced into treatment apparatus from transfer container

A manufacturing method comprising:

• transferring a container with a first substrate holder provided in the container from a container supplier to a substrate supplier that sells a substrate provided with a TFT;
• manufacturing the substrate provided with the TFT by the substrate supplier;
• replacing the first substrate holder by a second substrate holder to provide the second substrate holder in the container depending on a size of the substrate in the substrate supplier;
• storing the substrate in the container in an atmosphere where electrostatic is eliminated by an ionizer in the substrate supplier by holding the substrate by the second substrate holder;
• transferring the container to a production plant from the substrate supplier;
• installing the container in a treatment apparatus in the production plant to introduce the substrate into the treatment apparatus in the production plant;
• and
• performing a treatment on the substrate in the treatment apparatus in the production plant,
• wherein the substrate supplier is outside the production plant,
• wherein the second substrate holder has a different size than the first substrate holder, and wherein the container that has been used at the production plant is recalled and recycled by the substrate supplier.