Treatment device, treatment device consumable parts management method, treatment system, and treatment system consumable parts management method

A consumable component management method adopted in a processing apparatus capable of executing a plurality of types of processing under different processing conditions inside a processing chamber in which consumable components are disposed, comprising:

• a step in which a measuring means is engaged to measure a utilization status of a consumable component in correspondence to each type of processing executed in said processing chamber;
• and
• a step in which utilization statuses corresponding to the individual types of processing, having been measured by said measuring means, are obtained, wear coefficients each indicating a wear extent change rate determined in advance for said consumable component in correspondence to a specific type of processing among the plurality of types of processing indicated in wear coefficient information for said consumable component stored in a storage means, are obtained, a wear index value is calculated for said consumable component based upon said utilization statuses corresponding to the individual types of processing and said wear coefficients corresponding to the individual types of processing and said consumable component is managed based upon said calculated wear index value.

A consumable component management method adopted in a processing system that includes at least one processing apparatus capable of exchanging information with an external apparatus and executing a plurality of types of processing under different processing conditions inside a processing chamber having consumable components disposed therein, comprising:

• a step in which a measuring means is engaged to measure a utilization status of a consumable component in correspondence to each type of processing executed in said processing chamber;
• and
• a step in which utilization statuses corresponding to the individual types of processing, having been measured by said measuring means, are obtained, wear coefficients each indicating a wear extent change rate determined in advance for said consumable component in correspondence to a specific type of processing among the plurality of types of processing, indicated in wear coefficient information for said consumable component stored in a storage means, are obtained, a wear index value is calculated for said consumable component based upon said utilization statuses corresponding to the individual types of processing and said wear coefficients corresponding to the individual types of processing and said consumable component is managed based upon said calculated wear index value.