Actuator device, liquid-jet head and liquid-jet apparatus
AssigneeSeiko Epson Corporation
InventorTomoaki Takahashi
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Abstract
Provided is an actuator device including piezoelectric elements which are displaceably provided on a substrate. Each piezoelectric element is formed of a lower electrode, a piezoelectric layer and an upper electrode. In the actuator device, longitudinal end portions of the upper electrode define longitudinal end portions of a piezoelectric active portion to be a substantial driver of the piezoelectric element. The lower electrode and the piezoelectric layer are provided continuously to the longitudinal outside of the piezoelectric active portion. Regions of the piezoelectric layer outside of the piezoelectric active portion are formed so that thin film portions may have a thin thickness.
Claims12
An actuator device comprising piezoelectric elements which are displaceably provided on a substrate, each of the piezoelectric elements being formed of a lower electrode, a piezoelectric layer and an upper electrode, wherein
- longitudinal end portions of the upper electrode define longitudinal end portions of a piezoelectric active portion to be a substantial driver of the piezoelectric element,
- the lower electrode and the piezoelectric layer are provided continuously to the longitudinal outside of the piezoelectric active portion, and
- regions of the piezoelectric layer outside of the piezoelectric active portion are formed to be thin film portions, thickness of which is thinner than thickness of the piezoelectric layer in a region to be the piezoelectric active portion.
Dependencies are inferred from the claim text.