Multiple optical head inspection system and a method for imaging an article
AssigneeApplied Materials Israel Ltd.
InventorsEmanuel Elyasaf, Avishay Guetta
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AssigneeApplied Materials Israel Ltd.
InventorsEmanuel Elyasaf, Avishay Guetta
Estimating the term…
A method for imaging an article, the method includes: (i) providing short duration light pulses; (ii) directing the light pulses, by multiple optical heads, to illuminate multiple spaced apart areas of an article; and (iii) directing light from the multiple areas towards multiple two-dimensional light sensors; whereas (iv) imparting motion between the article and the multiple optical heads during the stages of providing and directing. An apparatus for inspecting an article that includes: (i) at least one pulsating source for providing short duration light pulses; (ii) multiple optical heads, adapted to direct the light pulses to illuminate multiple spaced apart areas of an article and to collect light from the multiple areas towards multiple two-dimensional light sensors; and (iii) a positioning device which is adapted to impart motion between the article and the multiple optical heads.
An apparatus for inspecting an article, comprising:
The apparatus of claim I wherein at least one optical head comprises an objective lens for collecting light from a single area.
A method for imaging an article, the method comprising:
Dependencies are inferred from the claim text.