Measurement apparatus

Abstract

A measurement apparatus for measuring a distance between a base surface and an upper surface of a stepped structure of a workpiece. The measurement apparatus includes a supporting member having an upper surface for supporting the workpiece, a holding member fixed on the top surface, and a micrometer. The holding member includes a reference platform and a depression formed on the reference platform and facing the upper surface. The micrometer is fixed to the holding member and includes an extendable measuring shaft with a contacting portion extending out of the reference platform. The distance is measured by pushing the workpiece into the depression until the base surface make contact with the reference platform.

Dependencies are inferred from the claim text.