Method of fabricating inkjet printhead with projections patterned across nozzle plate
AssigneeSilverbrook Research Pty Ltd
InventorKia Silverbrook
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Abstract
A method of fabricating an inkjet printhead. The method includes the steps of: (a) forming a plurality of MEMS ink ejection assemblies on an ink-ejection surface of a silicon substrate, each ink ejection assembly being sealed with roof material spanning across the ink ejection assemblies to define a nozzle plate; (b) etching partially into the roof material to form simultaneously a respective nozzle rim for each ink ejection assembly and a plurality of projections patterned across the nozzle plate between nozzle rims; and (c) etching through the roof material to form a respective nozzle aperture for each ink ejection assembly. The projections patterned across the nozzle plate between nozzle rims are useful for reducing stiction between particulates and the nozzle plate.
Claims19
A method of fabricating an inkjet printhead, said method comprising the steps of:
- (a) forming a plurality of MEMS ink ejection assemblies on an ink-ejection surface of a substrate, each ink ejection assembly being sealed with roof material, said roof material spanning across the ink ejection assemblies to define a nozzle plate;
- (b) etching partially into said roof material to form simultaneously a respective nozzle rim for each ink ejection assembly and a plurality of projections patterned across said nozzle plate between nozzle rims;
- and
- (c) etching through said roof material to form a respective nozzle aperture for each ink ejection assembly, thereby forming said inkjet printhead having said projections patterned across said nozzle plate.
Dependencies are inferred from the claim text.