Method of manufacturing a piezoelectric element

A method of manufacturing a piezoelectric element, the method comprising:

• forming a first base substrate having an element to be transferred;
• forming a second base substrate;
• and
• transferring the element to be transferred from the first base substrate to the second base substrate,
• wherein the forming of the first base substrate having the element to be transferred includes:
• forming a first electrode above a first substrate,
• forming a piezoelectric layer above the first electrode,
• forming a second electrode above the piezoelectric layer,
• crystallizing the piezoelectric layer,
• forming a dielectric layer at least above the second electrode, and
• etching the dielectric layer such that at least a portion of the second electrode is exposed and the dielectric layer has a protrusion upwardly protruding with respect to the second electrode,
• wherein the forming of the second base substrate includes forming a third electrode above a second substrate, and
• wherein the transferring of the element to be transferred from the first base substrate to the second base substrate includes bonding the element and the second base substrate such that the second base substrate is in contact with the protrusion and the portion of the second electrode that is exposed is in contact with the third electrode.