Method and apparatus for fabricating high temperature superconducting film through auxiliary cluster beam spraying, and high temperature superconducting film fabricated using the method

A method of fabricating a high temperature superconducting film comprising:

• providing a substrate in a vacuum chamber;
• depositing a high temperature superconducting material on the substrate after evaporating the high temperature superconducting material in the vacuum chamber;
• forming, a cluster beam material into gas atoms by heating the cluster beam material charged in a material receptacle housing disposed in the vacuum chamber;
• and
• spraying the formed gas atoms of the cluster beam material over the substrate simultaneously with said depositing the high temperature superconducting material on the substrate, and thereby forming pinning centers in the high temperature superconducting film to increase a critical current density of the superconducting film.