Transportation apparatus and drive mechanism

A transfer apparatus for target substrates, comprising:

• a rotary base rotatable integrally with a rotary shaft;
• first and second arm mechanisms configured to bend and stretch, each of the first and second arm mechanisms including a proximal end arm attached to the rotary base, an intermediate arm, and a pick which are pivotally coupled to each other sequentially from the rotary base, and each of the picks being disposed to support a separate one of the target substrates;
• a link mechanism coupling the proximal end arms of the first and second arm mechanisms to each other to drive and interlock the first and second arm mechanisms, the link mechanism including a driving link and first and second driven links which respectively couple the driving link directly to the proximal end arms of the first and second arm mechanisms, the driving link being rotatable integrally with a pivot shaft that is coaxial with the rotary shaft and rotatably supported by the rotary base;
• a first driving mechanism which rotates the rotary base, the first driving mechanism including a first motor that provides a driving force for rotating the rotary base and a first transmission part that transmits the driving force of the first motor to the rotary shaft;
• and
• a second driving mechanism which drives the link mechanism so as to bend or stretch the first and second arm mechanisms in conjunction with each other, the second driving mechanism including a single second motor that is common to the first and second arm mechanisms and provides a driving force for swinging the link mechanism and a second transmission part that transmits the driving force of the second motor to the driving link.