Method and system for providing a microelectronic device using a plurality of focus distances
AssigneeWestern Digital (Fremont), LLC
InventorsYizhong Wang, Hai Sun, Hongping Yuan, Winnie Yu
Life of this patent
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Abstract
A method and system for providing a microelectric device are described. The method and system include providing a photoresist layer having a surface. The method and system also include setting a focus range and exposing the photoresist layer over the focus range to form a photoresist mask having a trench therein. The focus range corresponding to a plurality of focus distances. The focus range also corresponds to a nonzero angle to be formed in the photoresist layer and to the structure. The trench has at least one sidewall that forms the angle with a normal to the surface. The method and system also include providing the structure utilizing the trench.
Claims23
A method for providing a structure in a microelectronic device comprising:
- providing a photoresist layer having a surface;
- setting a focus range corresponding to an angle to be formed in the photoresist layer and corresponding to the structure;
- exposing the photoresist layer over the focus range to form a photoresist mask having a trench therein, the trench having at least one sidewall forming the angle with a normal to the surface, the angle being nonzero, the focus range corresponding to a plurality of focus distances;
- and
- providing the structure utilizing the trench.
A method for providing a magnetic transducer comprising:
- providing a photoresist layer having a surface;
- exposing the photoresist layer over a focus range to form a photoresist mask having a trench therein, the trench having at least one sidewall having an angle with respect to a normal to the surface, the angle being nonzero, the focus range corresponding to a plurality of focus distances, the focus range being selected to correspond to the angle to be formed;
- and
- providing a perpendicular magnetic recording (PMR) pole utilizing the trench.
A method for providing a magnetic transducer comprising:
- providing a perpendicular magnetic recording (PMR) pole layer;
- providing a photoresist layer on the PMR pole layer, the photoresist layer having a surface;
- exposing the photoresist layer over a focus range to form a photoresist mask having a trench therein, the trench having a base and at least one sidewall having an angle with respect to a normal to the surface, the angle being greater than zero and not more than three degrees, the base exposing a portion of the PMR pole layer, the focus range corresponding to a plurality of focus distances, the focus range being selected to correspond to the angle to be formed;
- providing a hard mask layer, a portion of the hard mask layer residing in the trench;
- removing the photoresist mask, a hard mask including the portion of the hard mask remaining after the removing of the photoresist mask;
- performing an ion mill on the PMR pole layer.
A method for providing a magnetic transducer comprising:
- providing a dyed photoresist layer having a surface;
- exposing the dyed photoresist layer over a focus range to form dyed photoresist mask having a trench therein, the trench having at least one sidewall forming an angle with a normal to the surface, the angle being greater than seven degrees and not more than nine degrees, the focus range corresponding to a plurality of focus distances, the focus range being selected to correspond to the angle to be formed;
- providing a perpendicular magnetic recording (PMR) pole layer, a portion of the PMR pole layer residing in the trench;
- removing the dyed photoresist mask, the portion of the PMR pole layer remaining after the removing of the dyed photoresist mask;
- trimming the portion of the PMR pole layer.
A method for providing a magnetic head comprising:
- providing a photoresist layer having a surface;
- exposing the photoresist layer over a focus range to form a photoresist mask having a trench therein, the trench having at least one sidewall forming an angle with a normal to the surface, the angle being nonzero, the focus range corresponding to a plurality of focus distances, the focus range being selected to correspond to the angle to be formed;
- and
- providing a perpendicular magnetic recording (PMR) pole utilizing the trench.
Dependencies are inferred from the claim text.