Substrate processing apparatus, parameter management system for substrate processing apparatus, parameter management method for substrate processing apparatus, program, and storage medium

A method for a substrate processing apparatus including a storage device that stores parameters categorized into a plurality of categories, and a control device that carries out processing on a substrate based on the parameters, the parameters configuring a plurality of components of the substrate processing apparatus, each of the categories determining whether corresponding parameters are to be changed, the method comprising:

• specifying, in a category change defining device, parameters whose category is to be changed;
• changing, at a parameter category changing device, the category of each of the parameters specified when functions are added or changed in the substrate processing apparatus;
• and
• enabling, in a parameter changing device, each of the parameters to be changed in accordance with a category corresponding thereto when the functions are added or changed in the substrate processing apparatus.

A computer-readable storage medium storing computer-readable instructions thereon for causing a computer to implement a parameter management method for a substrate processing apparatus comprising a storage device that stores parameters categorized into a plurality of categories, the parameters configuring a plurality of components of the substrate processing apparatus, and a control device that carries out processing on a substrate based on the parameters, the computer-readable instructions when executed by the computer cause the computer to perform the method comprising:

• specifying parameters whose category is to be changed;
• changing the category of each of the parameters specified when functions are added or changed in the substrate processing apparatus;
• and
• enabling each of the parameters to be changed in accordance with a category corresponding thereto when the functions are added or changed in the substrate processing apparatus.

A substrate processing apparatus that carries out processing on a substrate, the substrate processing apparatus comprising:

• a storage device that stores parameters for controlling the processing, the parameters configuring a plurality of components of the substrate processing apparatus, the parameters being categorized into a plurality of categories;
• a control device that carries out the processing on the substrate based on the parameters;
• a parameter changing device that enables each of the parameters to be changed in accordance with a corresponding category;
• a parameter category changing device that changes the category of a subset of the parameters;
• and
• a category restoring device that, in response to the substrate processing apparatus being restarted, restores each of the categories that have been changed by said parameter category changing device to an original category.