Method of forming a carbon-containing material
AssigneeMicron Technology, Inc.
InventorGurtej S. Sandhu
Life of this patent
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Abstract
A method includes forming ionic clusters of carbon-containing molecules, which molecules have carbon-carbon sp2 bonds, and accelerating the clusters. A surface of a substrate is irradiated with the clusters. A material is formed on the surface using the carbon from the molecules. The material includes carbon and may optionally include hydrogen. The material may include graphene. The material may form a monolayer. The molecules may include one or more material selected from the group consisting of graphene, carbon allotropes, ethylene, and hydrocarbon molecules containing ethylenic moieties. A fused region may be formed in the substrate as an interface between the substrate and the material. The clusters may have diameters of at least 20 nanometer s and may be accelerated to an energy of at least 0.5 keV.
Claims21
A method comprising:
- providing a gas phase including carbon-containing molecules;
- supersonically and adiabatically expanding the gas phase, forming ionic clusters of the carbon-containing molecules, wherein the molecules have carbon-carbon sp2 bonds and comprises one or more materials selected from the group consisting of graphene, carbon allotropes, ethylene, and hydrocarbon molecules containing ethylenic moieties;
- accelerating the clusters;
- irradiating a surface of a substrate with the accelerated clusters;
- forming a material on the surface using the carbon from the molecules in the accelerated clusters, the material consisting of carbon and, optionally, hydrogen;
- and
- forming an electronic device having an electric circuit and containing at least a portion of the material in the electric circuit.
A method comprising:
- providing a gas phase including carbon-containing molecules;
- condensing the gas phase into ionic clusters of the carbon-containing molecules, which molecules have carbon-carbon sp2 bonds, and accelerating the clusters;
- irradiating a surface of a substrate with the accelerated clusters and infusing carbon into the surface, the substrate containing a first material;
- forming a second material on the surface using the carbon from the molecules in the accelerated clusters, the second material exhibiting a composition different from the first material and exhibiting a graphene structure;
- forming a fused region in the substrate as an interface between the substrate and the second material, the fused region containing some of the second material;
- and
- forming a field effect transistor containing at least a portion of the second material in its channel region.
A method comprising:
- forming graphene-containing ionic clusters having carbon-carbon sp2 bonds and diameters of at least 20 nm;
- accelerating the clusters to an energy of at least 0.5 keV;
- irradiating a surface of a substrate with the clusters and infusing graphene onto the surface;
- forming a monolayer of a material on the surface using the graphene from the clusters, the material consisting of carbon and, optionally, hydrogen and exhibiting a graphene structure;
- and
- due to the irradiating, infusing graphene into the surface and forming a fused region in the substrate as an interface between the substrate and the material, the fused region containing some of the material.
Dependencies are inferred from the claim text.