Device for producing microstructures

A device for producing microstructures, comprising:

• a spindle which can be rotated about a longitudinal axis thereof;
• a fixture provided on said spindle for clamping a workpiece;
• an linear drive adapted to produce a linear feed motion in a first direction;
• an actuator arranged on said linear drive;
• wherein said actuator comprises:
• a fast drive for driving a tool in an axial direction substantially perpendicular to a workpiece surface by generating a fast advancing motion of said tool in the axial direction;
• a guide mechanism coupled with said fast drive and said tool and configured to allow feeding of the tool in the axial direction of said fast drive, and to substantially resist movement of said tool in a plane perpendicular to the axial direction;
• wherein said guide mechanism further includes biasing means for generating a restoring force acting against said advancing motion;
• and
• a controller for controlling a movement of said actuator, said controller being configured for controlling movement of said actuator relative to a workpiece in response to an angular position of said workpiece and a position of said actuator along a feed direction of said linear drive;
• wherein said actuator has a first resonant frequency of at least 1500 Hz;
• and wherein said controller is configured for generating a filtered signal for driving said actuator, said filtered signal being selected from the group formed by a low-pass filtered and a band-pass filtered signal, said filtered signal having an upper cut-off frequency being lower than a resonant frequency of said actuator.