Flat magnetic element and power IC package using the same
AssigneesKabushiki Kaisha Toshiba, Toshiba Materials Co., Ltd.
InventorsTetsuo Inoue, Akira Sato, Katsutoshi Nakagawa
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Abstract
A planar magnetic device 1 including a first magnetic layer 3, a second magnetic layer 5, and a planar coil 4 disposed between the first magnetic layer 3 and the second magnetic layer 5, wherein magnetic particles 7 having a shape ratio S/L of 0.7 to 1 when a length of a long axis is L and a length of a short axis orthogonal to the long axis is L are filled in a gap W between coil wirings of the planar coil 4. According to the planar magnetic device 1, it is possible to realize a planar magnetic device such as an inductor reduced in height by using fine particles that enable to effectively obtain a large inductance value.
Claims11
A planar magnetic device comprising:
- a first magnetic layer,
- a second magnetic layer, and
- a planar coil disposed between the first magnetic layer and the second magnetic layer,
- wherein
- magnetic particles, having a shape ratio S/L of 0.7 to 1 where a length of a long axis is L and a length of a short axis orthogonal to the long axis is S, fill a gap between coil wirings of the planar coil, the gap between the coil wirings of the planar coil being W, where W is 200 μm or less;
- an average particle diameter of the magnetic particles is W/2 or less;
- a thickness of the planar magnetic device is 0.5 mm or less;
- and
- a filling ratio of the magnetic particles filled in the gap between the coil wirings of the planar coil is 30 vol. % or more.
Dependencies are inferred from the claim text.