Method for maintaining vacuum-tight inside a panel module and structure for the same
AssigneeIndustrial Technology Research Institute
InventorsChih-Ping Peng, Yun-Jiau Shiau
Life of this patent
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Abstract
This invention provides a method for maintaining vacuum of a panel module and a structure of the panel module. A sealing material is suspended inside the panel module right above an exhaust opening of the panel module connecting with an exhaust tube. After exhausting the inside of the panel module, the sealing material is heated and molten so as to drop down to seal the exhaust tube. As such, the panel module becomes vacuum-tight. During a subsequent annealing process to heat the exhaust tube to its melting temperature, ambient air is prohibited from flowing into the panel module.
Claims9
A high vacuum panel module, comprising:
- a first substrate;
- a second substrate having an exhaust opening;
- a side frame disposed between said first substrate and said second substrate;
- an exhaust tube connected to said exhaust opening;
- a sealing material sealing and blocking an inner aperture of said exhaust tube;
- and
- a conductive member disposed inside said panel module that suspends said sealing material above said exhaust opening before said sealing material is heated and molten.
A high vacuum panel module, comprising:
- a first substrate;
- a second substrate having an exhaust opening;
- a side frame disposed between said first substrate and said second substrate;
- an exhaust tube connected to said exhaust opening;
- a sealing material sealing and completely blocking an inner aperture of said exhaust tube;
- and
- a conductive member disposed inside said panel module that suspends said sealing material above said exhaust opening before said sealing material is heated and molten.
A high vacuum panel module, comprising:
- a first substrate;
- a second substrate having an exhaust opening;
- a side frame disposed between said first substrate and said second substrate;
- an exhaust tube connected to said exhaust opening;
- and
- a sealing material suspended by a conductive member inside of said panel module;
- wherein a projection of said sealing material upon a cross-sectional area of said exhaust tube is at least larger than a smallest cross-sectional area of said exhaust opening.
Dependencies are inferred from the claim text.