Method and apparatus for producing nitrogen trifluoride
AssigneeShowa Denko K.K.
InventorsHiromoto Ohno, Toshio Ohi, Yuji Sakai
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Abstract
A method for producing nitrogen trifluoride related to the present invention is characterized in that a fluorine gas and an ammonia gas are fed into a tubular reactor and are reacted with each other in the presence of a diluting gas in a gaseous phase under the condition of no catalyst to produce a gas product mainly composed of nitrogen trifluoride and a solid product mainly composed of ammonium fluoride and/or acidic ammonium fluoride, and then the solid product attached to an inner wall of the tubular reactor is removed by means of a device for removing the solid product, which device is mounted to the tubular reactor.
Claims24
A method for producing nitrogen trifluoride comprising producing a gas product mainly composed of nitrogen trifluoride and a solid product mainly composed of ammonium fluoride and/or acidic ammonium fluoride by feeding a fluorine gas and an ammonia gas into a tubular reactor and reacting the gases in the presence of a diluting gas in a gaseous phase under the condition of no catalyst;
- and removing the solid product attached to an inner wall of the tubular reactor by means of an air-type piston vibration device mounted outside the tubular reactor.
A method for producing nitrogen trifluoride comprising producing a gas product mainly composed of nitrogen trifluoride and a solid product mainly composed of ammonium fluoride and/or acidic ammonium fluoride by feeding a fluorine gas and an ammonia gas into a tubular reactor from an upper part of the reactor, the tubular reactor being installed so that its longitudinal direction is in a vertical direction, and reacting the gases in the presence of a diluting gas in a gaseous phase under the condition of no catalyst;
- scraping off the solid product attached to an inner wall of the tubular reactor by means of a scraping device mounted inside the tubular reactor;
- and removing the solid product from the gas product by using a device and a filter that are mounted at a lower part of the reactor and separate and discharge solids,
- wherein the device that is mounted at a lower part of the reactor and separates and discharges solids is a device equipped with a rotary valve.
A method for producing nitrogen trifluoride comprising producing a gas product mainly composed of nitrogen trifluoride and a solid product mainly composed of ammonium fluoride and/or acidic ammonium fluoride by feeding a fluorine gas and an ammonia gas into a tubular reactor from an upper part of the reactor, the tubular reactor being installed so that its longitudinal direction is in a vertical direction, and reacting the gases in the presence of a diluting gas in a gaseous phase under the condition of no catalyst;
- knocking off the solid product attached to an inner wall of the tubular reactor by means of a hammering device mounted to the tubular reactor;
- and removing the solid product from the gas product by using a device and a filter that are mounted at a lower part of the reactor and separate and discharge solids,
- wherein the device that is mounted at a lower part of the reactor and separates and discharges solids is a device equipped with a rotary valve.
A method for producing nitrogen trifluoride comprising producing a gas product mainly composed of nitrogen trifluoride and a solid product mainly composed of ammonium fluoride and/or acidic ammonium fluoride by feeding a fluorine gas and an ammonia gas into a tubular reactor from an upper part of the reactor, the tubular reactor being installed so that its longitudinal direction is in a vertical direction, and reacting the gases in the presence of a diluting gas in a gaseous phase under the condition of no catalyst;
- knocking off the solid product attached to an inner wall of the tubular reactor by means of an air-type piston vibration device mounted outside the tubular reactor;
- and removing the solid product from the gas product by using a device and a filter that are mounted at a lower part of the reactor and separate and discharge solids,
- wherein the device that is mounted at a lower part of the reactor and separates and discharges solids is a device equipped with a rotary valve.
A method for producing nitrogen trifluoride comprising producing a gas product mainly composed of nitrogen trifluoride and a solid product mainly composed of ammonium fluoride and/or acidic ammonium fluoride by feeding a fluorine gas and an ammonia gas into a tubular reactor from an upper part of the reactor, the tubular reactor being installed so that its longitudinal direction is in a vertical direction, and reacting the gases in the presence of a diluting gas in a gaseous phase under the condition of no catalyst,
- the reaction being carried out using two or more of the tubular reactors in a manner such that the two or more tubular reactors are switched alternately;
- and the method further comprising:
- removing the solid product attached to an inner wall of the tubular reactor by using at least one device selected from a hammering device, a scraping device and an air-type piston vibration device, which device is mounted to the tubular reactor, and
- removing the solid product from the gas product by using a device and a filter that are mounted at a lower part of the reactor and separate and discharge solids,
- wherein the device that is mounted at a lower part of the reactor and separates and discharges solids is a device equipped with a rotary valve.
An apparatus for producing nitrogen trifluoride comprising a tubular reactor equipped with fluorine gas feeding means, ammonia gas feeding means, an air-type piston vibration device and reaction temperature controlling means;
- means for storing a solid product removed from the reactor;
- and means for separating the solid product from a gas component.
Dependencies are inferred from the claim text.