Compound, polymer, and radiation-sensitive composition

A polymer prepared by polymerizing or copolymerizing at least one compound according to formulae (1), (2) or (3) below, wherein the polymer has a weight average molecular weight determined by gel permeation chromatography of 1,000 to 100,000,

• wherein:
• in formula (1), R1 represents a methyl group, a trifluoromethyl group, or a hydrogen atom, R2 and R3 independently represent a hydrogen atom or a substituted or unsubstituted, linear or branched alkyl group having 1 to 10 carbon atoms, Mm+ represents an onium cation, m represents an integer of 1 to 3, and n represents an integer of 0 to 3;
• in formula (2), R4 represents a methyl group, a trifluoromethyl group, or a hydrogen atom, at least one of the Rf groups represents a fluorine atom or a linear or branched perfluoroalkyl group having 1 to 10 carbon atoms, A represents a divalent organic group or a single bond, G represents a divalent organic group having a fluorine atom or a single bond, Mm+ represents an onium cation, m represents an integer of 1 to 3, and p represents an integer of 1 to 8;
• in formula (3), R5 represents a methyl group, a trifluoromethyl group, or a hydrogen atom, R6 represents an —OR6′ group or an —R6′ group, wherein R6 is represented by the following formulas (3a) or (3b), at least one of the Rf groups represents a fluorine atom or a linear or branched perfluoroalkyl group having 1 to 10 carbon atoms, A represents a divalent organic group or a single bond, G represents a divalent organic group having a fluorine atom or a single bond, and q represents an integer of 1 to 8
• wherein, in formula (3a), Y represents a divalent organic group and, in formula (3b), R14 and R15 independently represent a hydrogen atom or a monovalent organic group, or form a ring together with the carbon atom to which R14 and R15 bond.

A polymer prepared by copolymerization of at least one compound represented by the following formulae (1), (2), or (3) and a compound represented by the following formula (4), wherein the polymer has a weight average molecular weight determined by gel permeation chromatography of 1,000 to 100,000

• wherein:
• in formula (1), R1 is a methyl group, a trifluoromethyl group, or a hydrogen atom, R2 and R3 independently represent a hydrogen atom or a substituted or unsubstituted, linear or branched alkyl group having 1 to 10 carbon atoms, Mm+ represents a metal ion or an onium cation, m represents an integer of 1 to 3, and n is an integer of 0 to 3;
• in formula (2), R4 is a methyl group, a trifluoromethyl group, or a hydrogen atom, at least one of the Rf groups represents a fluorine atom or a linear or branched perfluoroalkyl group having 1 to 10 carbon atoms, A represents a divalent organic group or a single bond, G represents a divalent organic group having a fluorine atom or a single bond, Mm+ represents a metal ion or an onium cation, m represents an integer of 1 to 3, and p represents an integer of 1 to 8;
• in formula (3), R5 is a methyl group, a trifluoromethyl group, or a hydrogen atom, R6 indicates a monovalent organic group, at least one of the Rf groups represents a fluorine atom or a linear or branched perfluoroalkyl group having 1 to 10 carbon atoms, A represents a divalent organic group or a single bond, G represents a divalent organic group having a fluorine atom or a single bond, and q is an integer of 1 to 8;
• and
• in formula (4), R7 represents a methyl group, a trifluoromethyl group, or a hydrogen atom, R8 independently represents a monovalent alicyclic hydrocarbon group having 4 to 20 carbon atoms, a derivative thereof, or a linear or branched alkyl group having 1 to 4 carbon atoms, and (i) at least one of the R8 groups is the alicyclic hydrocarbon group or the derivative thereof, or (ii) two of the R8 groups form a divalent alicyclic hydrocarbon group having 4 to 20 carbon atoms or a derivative thereof in combination with the carbon atom to which the two R8 groups bond.