X-ray source and fluorescent X-ray analyzing apparatus
AssigneeToshiba Electron Tubes & Devices Co., Ltd.
InventorsNobutada Aoki, Akiko Kakutani
Life of this patent
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Abstract
The present invention relates to an X-ray source for emitting a characteristic X-ray and a fluorescent X-ray analyzing apparatus using the X-ray source. A secondary target is arranged in superposition on a primary target. An electron beam generated by an electron gun enters the primary target, which passes and emits a continuous X-ray. The secondary target transmits and emits a characteristic X-ray excited by the continuous X-ray emitted from the primary target. The primary target and the secondary target are superposed one on the other, so that the continuous X-ray emitted from the primary target efficiently excites the secondary target thereby to efficiently generate the characteristic X-ray.
Claims6
An X-ray source comprising:
- a vacuum container having an X-ray transmission window;
- an electron gun which generates an electron beam in the vacuum container;
- an unshielded primary target having an angled outer surface and positioned within the vacuum container and entered by the electron beam from the electron gun to emit an X-ray;
- and
- a cylindrically shaped secondary target arranged in opposed relation to the primary target and surrounding the primary target within the vacuum container,
- wherein the secondary target is configured with an inner peripheral surface that is parallel to the angled outer surface of the primary target, so that a characteristic X-ray generated by the secondary target, due to the excitation of the X-ray emitted from the primary targets, is emitted toward the X-ray transmission window.
An X-ray source comprising:
- a vacuum container having an X-ray transmission window;
- an electron gun which generates annular electron beam within the vacuum container;
- an annularly-shaped primary target having an angled inner surface and positioned within the vacuum container and entered by the annular electron beam from the electron gun to emit an X-ray;
- and
- an unshielded secondary target arranged in opposed relation to the primary target and being surrounded by the primary target and positioned at a center of the primary target within the vacuum container,
- wherein the secondary target configured with an outer surface that is parallel to the angled inner surface of the primary target, so that a characteristic X-ray generated by the secondary target, due to the excitation of the X-ray emitted from the primary target, is emitted toward the X-ray transmission window.
An X-ray source comprising:
- an electron gun which generates an electron beam;
- a primary target, entered by the electron beam from the electron gun, and configured to transmit and emit an X-ray;
- and
- a secondary target unit having a plurality of secondary targets arranged to about against the primary target and movable with respect to a position of X-ray generation of the primary target,
- wherein the secondary targets arranged at the position of X-ray generation and configured transmit and emit a characteristic X-ray, due to the due to the excitation of the x-ray emitted from the primary targets.
Dependencies are inferred from the claim text.