Spacer, manufacturing method thereof, image display apparatus using the spacer, and manufacturing method thereof
AssigneeCanon Kabushiki Kaisha
InventorsKazuo Kuroda, Yasushi Shimizu, Noriaki Oguri
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Abstract
A spacer for an image display apparatus includes a base material and a film configuration in which a first film having a structure that silver particles are dispersed in aluminum oxynitride and a second film containing tungsten, germanium and nitrogen are layered on the base material in this order.
Claims4
A spacer for an image display apparatus comprising:
- a base material;
- and
- a film configuration in which a first film having a structure that silver particles are dispersed in aluminum oxynitride and a second film containing tungsten, germanium and nitrogen are layered on the base material in this order.
An image display apparatus comprising:
- an airtight container having a first base plate with an electron source arranged thereon and a second base plate with an image display member arranged thereon, the image display member facing the electron source;
- and
- a spacer arranged between the first base plate and the second base plate,
- wherein the spacer has a base material and a film configuration in which a first film having a structure that silver particles are dispersed in aluminum oxynitride and a second film containing tungsten, germanium and nitrogen are layered on the base material in this order.
A method of manufacturing a spacer for an image display apparatus comprising the steps of:
- preparing a base material;
- forming a first film having a structure that silver particles are dispersed in aluminum oxynitride on the base material;
- and
- forming a second film containing tungsten, germanium and nitrogen on the first film.
A method of manufacturing an image display apparatus comprising an airtight container having a first base plate with an electron source arranged thereon and a second base plate with an image display member arranged thereon, the image display member facing the electron source, and a spacer arranged between the first base plate and the second base plate, the method comprising the steps of:
- preparing a base material;
- forming a first film having a structure that silver particles are dispersed in aluminum oxynitride on the base material;
- and
- forming a second film containing tungsten, germanium and nitrogen on the first film.
Dependencies are inferred from the claim text.