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US 7,808,061 B2Granted
Multi-die apparatus including moveable portions
AssigneeHewlett-Packard Development Company, L.P.
InventorsPeter Hartwell, Carl Picciotto
Life of this patent
Estimating the term…
Abstract
An electronic apparatus includes a first die, a second die, a third die, and a fourth die, wherein a portion of the second die and a portion of the third die are movably connected between the first die and the fourth die.
Claims32
An electronic apparatus, comprising:
- a first die;
- a second die;
- a third die;
- a fourth die, wherein the second die and the third die are interposed between the first die and the fourth die, and a portion of the second die and a portion of the third die are movably coupled between the first die and the fourth die;
- at least one actuator operable to hold a position of the portion of the third die relative to the fourth die;
- and
- the portion of the second die is operable to move while the portion of the third die is held in the position, wherein the movement of the portion of the second die is measured based on a change in distance or overlap between passive components on the first die and the portion of the second die.
4 more elements
An electronic apparatus comprising:
- a first die;
- a second die;
- a third die;
- a fourth die, wherein the second die and the third die are interposed between the first die and the fourth die, and a portion of the second die and a portion of the third die are movably coupled between the first die and the fourth die;
- a first set of electrodes on a surface of the portion of the third die;
- and
- a second set of electrodes facing the first set of electrodes and being provided on a surface of the fourth die, such that a voltage source is operable to generate a voltage in the first and second set of electrodes for generating an electrostatic force between the first and second set of electrodes in a cavity, the electrostatic force holding the portion of the third die stationary.
4 more elements
An electronic apparatus comprising:
- a first die;
- a second die;
- a third die;
- and
- a fourth die, wherein the second die and the third die are interposed between the first die and the fourth die, and a portion of the second die and a portion of the third die are movably coupled between the first die and the fourth die,
- wherein the portion of the second die and the portion of the third die have different masses.
3 more elements
A microelectromechanical system (MEMS) device comprising:
- a first die;
- a second die;
- a third die;
- a fourth die, wherein a portion of the second die and a portion of the third die are movably connected between the first die and the fourth die;
- material bonding the first die, the second die, the third die and the fourth die together;
- a via in the second die, the via in the second die providing a path for electrical signals traveling through the second die;
- and
- a via in the third die, the via in the third die providing a path for electrical signals traveling through the third die;
- a first circuit on the first die;
- a second circuit on the fourth die, wherein the first circuit is in electrical communication with the second circuit by transmitting the electrical signals using the vias in the second die and the third die;
- and
- a first set of active or passive circuit components on at least one of an upper surface and a lower surface of the second die;
- a second set of active or passive circuit components on at least one of an upper surface and a lower surface of the third die;
- and
- at least one actuator operable to hold the moveable portion of the third die stationary such that movement of the moveable portion of the second die is operable to be measured relative to the moveable portion of the third die.
12 more elements
A MEMS device comprising:
- four dies connected together in a stacked arrangement, the stacked arrangement including:
- a first die of the four dies;
- a second die of the four dies connected below the first die in the stacked arrangement, the second die including a moveable portion;
- a third die of the four dies connected below the second die in the stacked arrangement, the third die including a second moveable portion;
- and
- a fourth die of the four dies connected below the third die in the stacked arrangement, wherein the four dies are connected using a bonding material such that a cavity is formed between the first die and the fourth die and the moveable portions are operable to move in the cavity;
- at least one actuator comprising passive components on the second moveable portion and the fourth die, the at least one actuator being operable to hold the second moveable portion stationary such that movement of the first moveable portion is operable to be measured relative to the second moveable portion.
4 more elements
Dependencies are inferred from the claim text.