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US 7,807,334 B2Granted
Substrate having fine line, electron source and image display apparatus
AssigneeCanon Kabushiki Kaisha
InventorsYoshimi Uda, Kazuya Ishiwata, Shinsaku Kubo, Yasuyuki Watanabe
Life of this patent
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Abstract
As a substrate having a fine line and capable of suppressing crack generation in the substrate and peeling of the fine line, the invention discloses a configuration in which plural recesses are arranged on the fine line, and particularly a configuration in which the interval of the plural recesses does not exceed 200 μm. There is also disclosed a configuration in which the plural recesses are arranged along a direction crossing the longitudinal direction of the fine line.
Claims5
A method for forming an electroconductive wiring having recesses, the method comprising:
- a step of forming a first film comprising a photosensitive paste containing metal;
- a step of irradiating the first film with light through a first photomask bearing a line-shaped aperture pattern which corresponds to the shape of the electroconductive wiring;
- after the step of irradiating, a step of forming a second film over the first film, wherein the second film comprises a photosensitive paste containing metal, and the second film together with the first film is to form at least a part of the electroconductive wiring;
- a step of irradiating the second film with light through a second photomask bearing a line-shaped aperture pattern having a plurality of line-shaped apertures arranged in parallel;
- a development step of developing the first and second films irradiated with light;
- and
- a baking step of baking the first and second films irradiated with light which was developed in the development step in order to form the electroconductive wiring, wherein the electroconductive wiring has a surface on which a plurality of line-shaped recesses are arranged in parallel.
4 more elements
Dependencies are inferred from the claim text.