Pulse stretcher
AssigneeKLA-Tencor Technologies Corporation
InventorsAnatoly Shchemelinin, Ilya Bezel
Life of this patent
Estimating the term…
Abstract
A pulse stretcher includes a plurality of substantially parallel slab-like optical paths of different optical path lengths and a plurality of reflecting surfaces, which are totally internally reflecting surface formed, located at an end of the corresponding optical path. Due to the different path lengths, the pulse stretcher can spread out an input pulse into a stretched pulse having a longer pulse duration and proportionally lower intensity than the initial pulse.
Claims19
A pulse stretcher, comprising:
- a plurality of substantially parallel slab-like optical paths of different optical path lengths, each optical path having a first end and a second end, wherein the first ends of the optical paths are substantially aligned with each other
- a plurality of reflecting surfaces, wherein each reflecting surface is located at a second end of a corresponding optical path, wherein each reflecting surface is adapted to deflect an optical beam out of the pulse stretcher such that the optical beam does not intersect any of the other optical paths.
A method for temporally stretching an optical pulse, comprising:
- spatially dividing an initial optical pulse into a plurality of optical beams;
- transmitting the plurality of optical beams through a plurality of substantially parallel slab-like optical paths of different optical path lengths, each optical path having a first end and a second end, wherein the first ends of the optical paths are substantially aligned with each other
- reflecting the plurality of optical beams from a plurality of reflecting surfaces, wherein each reflecting surface is located at a second end of a corresponding optical path, wherein each reflecting surface is adapted to deflect a corresponding one of the optical beams out of the corresponding optical path such that the optical beam does not intersect any of the other optical paths;
- and
- spatially recombining the plurality of optical beams to form a stretched pulse, whereby the different optical path lengths lead to a longer pulse duration for the stretched pulse compared to an initial pulse duration for the initial optical pulse.
An optical system, comprising:
- a beam expander;
- a plurality of substantially parallel slab-like optical paths of different optical path lengths optically coupled to the beam expander, wherein the slab-like optical paths are configured to spatially divide an initial optical pulse into a plurality of optical beams, wherein each optical path having a first end and a second end, wherein the first ends of the optical paths are substantially aligned with each other;
- a plurality of reflecting surfaces, wherein each reflecting surface is located at a second end of a corresponding optical path, wherein each reflecting surface is adapted to deflect an optical beam out of the pulse stretcher such that the optical beam does not intersect any of the other optical paths;
- and
- one or more optical components optically coupled to the plurality of reflecting surfaces, wherein the one or more optical components are configured recombine the plurality of optical beams to form a stretched pulse, whereby the different optical path lengths lead to a longer pulse duration for the stretched pulse compared to an initial pulse duration for the initial optical pulse.
Dependencies are inferred from the claim text.