Electrostatic holding apparatus and electrostatic tweezers using the same

Abstract

To provide an electrostatic holding apparatus which is capable of performing handling for a long period of time even when a direct current high-voltage power supply is separated from the electrostatic holding apparatus. The electrostatic holding apparatus holds a workpiece to be held with an electrostatic force by applying prescribed voltages from the direct current high-voltage power supply to a plurality of electrode groups having the electrode groups as a holding section. The electrostatic holding apparatus is provided with an electrode potential drop modifying apparatus which modifies drops of potentials applied to the electrode groups by being separated from the direct current high-voltage power supply by switches. The electrode potential drop modifying apparatus includes, for instance, capacitors.

Dependencies are inferred from the claim text.