High frequency interconnect signal transmission lines
AssigneeHitachi Global Storage Technologies Netherlands B.V.
InventorsToshiki Hirano, Nobumasa Nishiyama, Haruhide Takahashi
Life of this patent
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Abstract
A micro-electromechanical signal transmission line is made from an electrically conductive material. It has a first distal end and a second distal end. The second distal end is free to move with respect to said first distal end. There exists an unsupported region between the first distal end and the second distal end. The unsupported region is juxtaposed at a controlled distance from at least one grounded conductive surface.
Claims20
A micro-electromechanical signal transmission line comprising:
- an electrically conductive material;
- a first distal end;
- a second distal end wherein said second distal end is free to move with respect to said first distal end;
- an unsupported region between said first distal end and said second distal end;
- and
- said unsupported region juxtaposed at a controlled distance from at least one grounded conductive surface;
- wherein said first distal end is configured to couple to a first termination pad, said second distal end is configured to couple to a second termination pad, a length of said unsupported region between said first distal end and said second distal end is in excess of a minimum length required for spanning between said first termination pad and said second termination pad, and said unsupported region between said first distal end and said second distal end is configured to allow unimpeded relative motion between said first termination pad and said second termination pad.
A hard disk drive comprising:
- a base casting for providing coupling points for components and sub-assemblies of said hard disk drive;
- a motor-hub assembly to which at least one disk is coupled allowing rotation of said disk about an axis approximately perpendicular and centered to said disk, wherein said motor-hub assembly is coupled to said base casting, wherein said disk comprising at least one surface of data tracks;
- a magnetic head for reading and writing said data tracks onto said surface;
- a slider comprising said magnetic head;
- a microactuator for adjusting said slider relative to said data tracks is coupled between said slider and a suspension, wherein said suspension is coupled to an actuator assembly for moving said slider arcuately across said data tracks;
- and
- a flexible micro-electromechanical signal line coupled to said microactuator, said flexible micro-electromechanical signal line comprising:
- an electrically conductive material;
- a first distal end;
- a second distal end wherein said second distal end is free to move with respect to said first distal end;
- an unsupported region between said first distal end and said second distal end;
- and
- said unsupported region juxtaposed at a controlled distance from at least one grounded conductive surface.
A method for fabricating a micro-electromechanical signal transmission line, said method comprising:
- depositing a conductive ground plane on a substrate;
- applying a first sacrificial layer above said ground plane;
- depositing a seed layer conducive to electroplating wherein said seed layer covers said sacrificial layer and said ground plane;
- applying a second sacrificial layer above selected portions of said seed layer;
- electroplating a conductive material onto exposed portions of said seed layer;
- and
- removing said first sacrificial layer and said second sacrificial layer such that said conductive material remains as a micro-electromechanical signal transmission line configured with a first distal end and a second distal end moveable relative to said first distal end, and an additional structure adjacent to the signal transmission line that is kept at ground potential.
Dependencies are inferred from the claim text.