Perpendicular magnetic recording head including wrap around shield with notched top write gap and method of fabricating the same
AssigneeHitachi Global Storage Technologies Netherlands B.V.
InventorsTsung Yuan Chen, Hung-Chin Guthrie, Yimin Hsu, Ming Jiang
Life of this patent
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Abstract
In a perpendicular recording head, a notch is formed in the top write gap at a location on top of the main pole. A perpendicular head with this notched top write gap structure has less transition curvature and better writability while reducing the adjacent track interference (ATI). Also, the process used to fabricate the head ensures that the trailing edge (writing edge) of the main pole is extremely flat with no corner rounding.
Claims17
A method of fabricating a perpendicular recording head comprising:
- forming a main pole layer;
- depositing a first mask layer on the main pole layer;
- etching the main pole layer to form a main pole;
- depositing an alumina layer over the first mask layer and the main pole;
- removing a portion of the alumina layer such that a surface of the alumina layer intersects an edge of the first mask layer;
- depositing a second mask layer having a pair of openings on opposite sides of the first mask layer;
- etching the alumina layer through the pair of openings in the second mask layer so as to form a cavity on each side of the main pole and an upward extending ridge of the alumina layer on each side of the first mask layer;
- removing the first and second mask layers;
- depositing a write gap layer on the main pole;
- and
- depositing a magnetic layer, the magnetic layer filling the cavities and covering the write gap layer.
A method of fabricating a perpendicular recording head comprising:
- forming a main pole layer;
- depositing a hard mask layer on the main pole layer;
- depositing a first photoresist mask layer on the hard mask layer;
- etching the hard mask layer through openings in the first photoresist mask layer;
- etching the main pole layer to form a main pole;
- depositing an alumina layer over the hard mask layer, the first photoresist mask layer and the main pole;
- removing a portion of the alumina layer such that a surface of the alumina layer intersects an edge of the first photoresist mask layer;
- depositing a second photoresist mask layer having a pair of openings on opposite sides of the first photoresist mask layer;
- etching the alumina layer through the pair of openings in the second mask layer so as to form a cavity on each side of the main pole and an upward extending ridge of the alumina layer on each side of the first photoresist mask layer;
- removing the first and second photoresist mask layers;
- depositing a write gap layer on the hard mask layer;
- and
- depositing a magnetic layer, the magnetic layer filling the cavities and covering the write gap layer.
A method of fabricating a perpendicular recording head comprising:
- forming a main pole;
- depositing a first mask layer;
- depositing an alumina layer over the first mask layer and the main pole;
- removing a portion of the alumina layer such that a surface of the alumina layer intersects an edge of the first mask layer;
- depositing a second mask layer having a pair of openings on opposite sides of the first mask layer;
- etching the alumina layer through the pair of openings in the second mask layer so as to form at least a cavity on each side of the main pole;
- removing the first and second mask layers;
- depositing a write gap layer on the main pole;
- and
- depositing a magnetic layer, the magnetic layer filling the cavities and covering the write gap layer.
Dependencies are inferred from the claim text.