Optical multi-axis linear displacement measurement system and a method thereof
AssigneeAcademia Sinica
InventorsIng-Shouh Hwang, En-Te Hwu, Kuang-Yuh Huang
Life of this patent
Estimating the term…
Abstract
The present invention provides an optical multi-axis linear displacement measurement system and a method thereof, and the system can detect the reflected light from the top surface of the object so as to obtain multi-axis linear displacements of the object. The optical multi-axis linear displacement measurement system utilizes a non-contact optical method for obtaining multi-axis linear displacements of the object and it can perform simultaneous multi-axis linear displacement measurements. The advantages of the system and method include: high response speed (bandwidth) for dynamic measurement, simple structure, cost effective, and high sensitivity for displacement measurements.
Claims41
An optical multi-axis linear displacement measurement system, comprising:
- an object having a curved surface with a known surface profile;
- and
- an optical detection device having the known surface profile stored therein, the optical detection device being configured for generating and focusing a light beam on the curved surface of the object to form a light spot thereon, simultaneously measuring a linear displacement of the curved surface of the object along the axis of the light and an angle of the curved surface normal relative to the axis of the light at the light spot, determining a linear displacement in the direction perpendicular to the axis of the light from the detected angular displacement of the reflected light beam from the curved surface of the object and the known surface profile, and determining the multi-axis linear displacement of the object including the linear displacement along the axis of the light and the linear displacement in the direction perpendicular to the axis of the light,
- wherein the light spot moves on the curved surface of the object in response of the movement of the object when the linear displacement of the curved surface of the object and the angle of the curved surface normal relative to the axis of the light at the light spot are measured by the optical detection device.
An optical multi-axis linear displacement measurement method, comprising:
- providing an object, which has a curved surface with a known surface profile;
- providing an optical detection device having the known surface profile stored therein for generating and focusing a light beam on the curved surface of the object to form a light spot thereon;
- moving the object to make the light spot move on the curved surface of the object in response thereto;
- simultaneously measuring a linear displacement of the curved surface of the object along the axis of the light and an angle of the curved surface normal relative to the axis of the light at the light spot;
- determining a linear displacement in the direction of one axis perpendicular to the axis of the light from the detected angular displacement of the reflected light beam from the curved surface of the object and the known surface profile;
- and
- determining the multi-axis linear displacement of the object including the linear displacement along the axis of the light beam and the linear displacement in the direction perpendicular to the axis of the light.
Dependencies are inferred from the claim text.