Coupled lamb wave resonators filter
AssigneeSTMicroelectronics S.r.l.
InventorsAlexandre Volatier, Pascal Ancey, Bertrand Dubus
Life of this patent
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Abstract
A coupled Lamb wave resonator filter includes first and second Lamb wave resonators. The first Lamb wave resonator includes a first resonant layer, and first and second electrodes on opposite sides of the first resonant layer. The second Lamb wave resonator includes a second resonant layer, and third and fourth electrodes on opposite sides of the second resonant layer. One of the sides of the first resonant layer belongs to a plane parallel to a plane corresponding to one of the sides of the second resonant layer. Both planes pass through the third and fourth electrodes of the second Lamb wave resonator. A periodic lattice acoustically couples the first and second resonant layers.
Claims33
A coupled Lamb wave resonator filter comprising:
- at least one first Lamb wave resonator comprising a first resonant layer, and first and second electrodes on opposite sides of said first resonant layer;
- at least one second Lamb wave resonator comprising a second resonant layer, and third and fourth electrodes on opposite sides of said second resonant layer;
- at least one of the sides of said first resonant layer belonging to a plane parallel to a plane corresponding to one of the sides of said second resonant layer, with both planes passing between said third and fourth electrodes of said second Lamb wave resonator;
- and
- a periodic lattice acoustically coupling said first and second resonant layers.
A coupled Lamb wave resonator filter comprising:
- at least one first Lamb wave resonator comprising a first resonant layer, and first and second electrodes on opposite sides of said first resonant layer;
- at least one second Lamb wave resonator comprising a second resonant layer, and third and fourth electrodes on opposite sides of said second resonant layer;
- at least one of the sides of said first resonant layer belonging to a plane parallel to a plane corresponding to one of the sides of said second resonant layer, with both planes passing between said third and fourth electrodes of said second Lamb wave resonator;
- and
- an acoustic coupler between said first and second resonant layers, and comprising a resonant material arranged between m pairs of metal areas, with metal areas of each of said m airs being aligned one above the other, where m is a natural non-zero integer number.
A method for making a coupled Lamb wave resonator filter comprising:
- providing at least one first Lamb wave resonator comprising a first resonant layer, and first and second electrodes on opposite sides of the first resonant layer;
- providing at least one second Lamb wave resonator comprising a second resonant layer, and third and fourth electrodes on opposite sides of the second resonant layer;
- at least one of the sides of the first Lamb wave resonant layer belonging to a plane parallel to a plane corresponding to one of the sides of the second Lamb wave resonant layer, with both planes passing through the third and fourth electrodes of the second Lamb wave resonator;
- and
- providing a periodic lattice for acoustically coupling the first and second Lamb wave resonant layers.
Dependencies are inferred from the claim text.