Tunable resonator using film bulk acoustic resonator (FBAR)
AssigneeSamsung Electronics Co., Ltd.
InventorsJea-Shik Shin, Yun-Kwon Park, In-Sang Song, Duck-Hwan Kim, Chul-Soo Kim
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Abstract
A tunable resonator is provided. The tunable resonator includes a film bulk acoustic resonator (FBAR) for performing a resonance, and at least one driver which is arranged at a side of the FBAR and is deformed and brought into contact with the FBAR by an external signal, thereby changing a resonance frequency of the FBAR. Accordingly, a multiband integration and a one-chip manufacture can be implemented simply using a micro electro mechanical system (MEMS) technology and a mass production is possible.
Claims17
A tunable resonator, comprising:
- a film bulk acoustic resonator (FBAR) arranged on a substrate;
- and
- a plurality of drivers arranged on the substrate and at least in part above the FBAR in such a manner the drivers are deformed and thereby brought into contact with the FBAR sequentially in response to an external signal so as to vary the resonance frequency of the FBAR in a stepwise manner.
A tunable resonator, comprising:
- a film bulk acoustic resonator (FBAR) for performing a resonance;
- at least one driver which is arranged at a side of the FBAR and is deformed and brought into contact with the FBAR by an external signal, thereby changing a resonance frequency of the FBAR;
- and
- a substrate for supporting the FBAR and the at least one driver,
- wherein the at least one driver is of a cantilever structure such that one end of the driver is in contact with a surface of the substrate and the other is distanced away from the surface of the substrate above the FBAR, and
- wherein the at least one driver is of a bimetal structure that comprises two metals having different coefficients of thermal expansion.
A tunable resonator comprising:
- a film bulk acoustic resonator (FBAR) for performing a resonance;
- at least one driver which is arranged at a side of the FBAR and is deformed and brought into contact with the FBAR by an external signal, thereby changing a resonance frequency of the FBAR;
- and
- a substrate for supporting the FBAR and the at least one driver,
- wherein the at least one driver comprises:
- a plurality of anchors arranged on a surface of the substrate around the FBAR;
- a membrane distanced away from the surface of the substrate above the FBAR;
- and
- a plurality of connection members for connecting the membrane and the plurality of anchors to support the membrane, the plurality of connection members being deformed by the external signal to move the membrane toward the FBAR.
Dependencies are inferred from the claim text.