Epitaxial oxide film, piezoelectric film, piezoelectric film element, liquid discharge head using the piezoelectric film element, and liquid discharge apparatus

A piezoelectric film composed of an epitaxial oxide film composed of a perovskite composite oxide represented by a general formula ABO3, the epitaxial oxide film comprising at least an A domain and a B domain having a crystal orientation deviation with respect to each other,

• wherein the crystal orientation deviation between the A domain and the B domain is more than 0° and less than 5°, and
• wherein domains arranged in different positions in the piezoelectric film with respect to one another are defined as the same domain if one of the following conditions is satisfied:
• (1) lattice constants of the domains are the same and crystal orientations of the domains are the same, and
• (2) lattice constants of the domains are the same and angles from the thickness direction of the piezoelectric film to the respective crystal orientations of the domains are the same.

A piezoelectric film composed of an epitaxial oxide film with a <100> orientation having at least a tetragonal and a perovskite composite oxide represented by a general formula ABO3, the epitaxial oxide film comprising at least an A domain, a B domain, a C domain, and a D domain having a crystal orientation deviation with respect to one another, wherein:

• each of the A domain and the B domain has a [001] orientation and each of the C domain and the D domain has a [100] orientation;
• the A domain and the C domain have at least a mirror image relation of a twin crystal, and a twin crystal plane of the twin crystal is {110};
• and
• the B domain and the D domain have at least a minor image relation of a twin crystal, and a twin crystal plane of the twin crystal is {110}.

A piezoelectric film element, comprising:

• a piezoelectric film composed of an epitaxial oxide film with a <100> orientation having at least a tetragonal;
• and
• a pair of electrodes in contact with the piezoelectric film, wherein:
• the piezoelectric film is composed of a perovskite composite oxide represented by a general formula ABO3, and has at least an A domain, a B domain, a C domain, and a D domain having a crystal orientation deviation with respect to one another;
• each of the A domain and the B domain has a [001] orientation and each of the C domain and the D domain has a [100] orientation;
• the A domain and the C domain have at least a mirror image relation of a twin crystal, and a twin crystal plane of the twin crystal is {110};
• and
• the B domain and the D domain have at least a minor image relation of a twin crystal, and a twin crystal plane of the twin crystal is {110}.

A liquid discharge head, comprising:

• a discharge port;
• a separate liquid chamber in communication with the discharge port;
• a piezoelectric substrate element provided in correspondence with the separate liquid chamber;
• and
• a vibration plate provided between the separate liquid chamber and the piezoelectric substrate element,
• the liquid discharge head discharging a liquid in the separate liquid chamber from the discharge port due to a volume change in the separate liquid chamber caused by the vibration plate, wherein:
• the piezoelectric substrate element has a piezoelectric film composed of an epitaxial oxide film with a <100> orientation having at least a tetragonal, and a pair of electrodes in contact with the piezoelectric film;
• the piezoelectric film is composed of a perovskite composite oxide represented by a general formula ABO3, and has at least an A domain, a B domain, a C domain, and a D domain having a crystal orientation deviation with respect to one another;
• each of the A domain and the B domain has a [001] orientation and each of the C domain and the D domain has a [100] orientation;
• the A domain and the C domain have at least a mirror image relation of a twin crystal, and a twin crystal plane of the twin crystal is {110};
• and
• the B domain and the D domain have at least a mirror image relation of a twin crystal, and a twin crystal plane of the twin crystal is {110}.

A liquid discharge apparatus, comprising a liquid discharge head including:

• a discharge port;
• a separate liquid chamber in communication with the discharge port;
• a piezoelectric substrate element provided in correspondence with the separate liquid chamber;
• and
• a vibration plate provided between the separate liquid chamber and the piezoelectric substrate element,
• the liquid discharge head discharging a liquid in the separate liquid chamber from the discharge port due to a volume change in the separate liquid chamber caused by the vibration plate, wherein:
• the piezoelectric substrate element has a piezoelectric film composed of an epitaxial oxide film with a <100> orientation having at least a tetragonal, and a pair of electrodes in contact with the piezoelectric film;
• the piezoelectric film is composed of a perovskite composite oxide represented by a general formula ABO3, and has at least an A domain, a B domain, a C domain, and a D domain having a crystal orientation deviation with respect to one another;
• each of the A domain and the B domain has a [001] orientation and each of the C domain and the D domain has a [100] orientation;
• the A domain and the C domain have at least a mirror image relation of a twin crystal, and a twin crystal plane of the twin crystal is {110};
• and
• the B domain and the D domain have at least a minor image relation of a twin crystal, and a twin crystal plane of the twin crystal is {110}.