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US 7,804,205 B2Granted
Electret device and electrostatic operating apparatus
AssigneeSanyo Electric Co., Ltd.
InventorsYoshiki Murayama, Naoteru Matsubara
Life of this patent
Estimating the term…
Abstract
An electret device includes an electret film capable of storing charges and a charge outflow inhibition film formed on an upper surface of a region having a high charge density in the electret film and inhibiting the charges stored in the electret film from flowing out.
Claims6
An electret device comprising:
- an electret film capable of storing charges;
- and
- a charge outflow inhibition film formed at least on an upper surface of a high charge density region of said electret film and inhibiting the charges stored in said electret film from flowing out, wherein
- said charge outflow inhibition film includes a first charge outflow inhibition portion formed on said upper surface of said high charge density region of said electret film and having a first thickness and a second charge outflow inhibition portion formed on an upper surface of a low charge density region of said electret film and having a second thickness smaller than said first thickness of said first charge outflow inhibition portion.
1 more element
An electrostatic operating apparatus comprising:
- a fixed electrode;
- a movable electrode capable of moving with respect to said fixed electrode, so provided as to be opposed to said fixed electrode at a prescribed distance;
- an electret device formed on an upper surface of either said fixed electrode or said movable electrode, and including an electret film capable of storing charges and a charge outflow inhibition film formed at least on an upper surface of a high charge density region of said electret film and inhibiting the charges stored in said electret film from flowing out, wherein
- said charge outflow inhibition film includes a first charge outflow inhibition portion formed on said upper surface of said high charge density region of said electret film and having a first thickness and a second charge outflow inhibition portion formed on an upper surface of a low charge density region of said electret film and having a second thickness smaller than said first thickness of said first charge outflow inhibition portion.
1 more element
Dependencies are inferred from the claim text.