TFT wiring comprising copper layer coated by metal and metal oxide
AssigneeLG Display Co., Ltd.
InventorsMakoto Sasaki, Gee Sung Chae
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Abstract
A gate electrode (wiring) (40) having a Cu layer (40a) surrounded by a coating film (40b) made of titanium or titanium oxide; a TFT substrate (31) comprising the gate electrode (wiring) (40) and a LCD comprising a pair of opposing substrates and a liquid crystal disposed between the opposing substrates, wherein one of the pair of opposing substrates is a TFT substrate (31), are disclosed.
Claims5
A wiring in a gate electrode in a thin film transistor comprising a Cu layer having a bottom surface, a top surface, and two side surfaces, wherein the bottom surface is on a first coating film made of molybdenum, and the three remaining surfaces are in contact with a second coating film made of molybdenum oxide, wherein the molybdenum oxide has a composition ratio of the number of molybdenum atoms to the number of oxygen atoms of “1” to “1 to 3”.
A wiring in a gate electrode in a thin film transistor comprising a Cu layer having a bottom surface, a top surface, and two side surfaces, wherein the bottom surface is on a first coating film made of at least one selected from molybdenum, chromium, and tantalum, and the three remaining surfaces are in contact with a second coating film made of at least one selected from molybdenum oxide, chromium oxide, and tantalum oxide, wherein the molybdenum oxide has a composition ratio of the number of molybdenum atoms to the number of oxygen atoms of “1” to “1 to 3” and the chromium oxide has a composition ratio of the number of chromium atoms to the number of oxygen atoms of “1” to “1 to 1.5” and tantalum oxide has a composition ratio of the number of tantalum atoms to the number of oxygen atoms of “1” to “1 to 2.5”.
A liquid crystal display device, comprising:
- a liquid crystal display panel;
- a thin film transistor;
- and
- a wiring in a gate electrode in the thin film transistor comprising a Cu layer having a bottom surface, a top surface, and two side surfaces,
- wherein the bottom surface is on a first coating film made of molybdenum, and the three remaining surfaces are in contact with a second coating film made of molybdenum oxide, wherein the molybdenum oxide has a composition ratio of the number of molybdenum atoms to the number of oxygen atoms of “1” to “1 to 3”.
Dependencies are inferred from the claim text.