Insulator for high current ion implanters
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsJames Huang, Yung-Cheng Kuo, Min-Kung Hsu
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Abstract
An insulator usable in high current ion implantation systems includes increased surface due to the configuration of an inner cylinder and an outer cylinder coupled to the inner cylinder at one end. A cylindrical cavity extends between the two cylinders increasing the surface area and making the insulator resistant to being coated by a coating that could produce a leakage path.
Claims18
In an ion implantation system having an ion source maintained at a high electric potential, a grounded end station adapted for holding substrates and a plurality of extraction electrodes accelerating the ions from a source head and directing an ion beam onto the substrates of the end station, the improvement comprising:
- an insulator disposed between a first component being a high voltage component and a second component being a lower voltage component or a component maintained at ground,
- the insulator comprising an inner cylindrical body surrounded by an outer cylindrical body with a gap therebetween, said inner cylindrical body oriented such that its axis extends from said first component to said second component, and
- the outer cylindrical body having opposed ends, one of the ends radially coupled to the inner cylindrical body,
- wherein the inner cylindrical body is longer than the outer cylindrical body and includes opposed end faces, each in confronting relation with and contacting and terminating at an exterior of a respective one of said first and second components and wherein each of said first and second components comprise electrodes, and
- wherein the insulator comprising the inner cylindrical body and the outer cylindrical body is a single uninterrupted and inseparable unit and the inner cylindrical body includes an axially central portion being completely diametrically solid.
In an apparatus having a chamber with a first component maintained at a high electric potential and proximate to a second component maintained at a lower electric potential and an ionic gas present therein, the improvement comprising:
- an insulator disposed between the first and second components,
- the insulator comprising an inner cylindrical body concentrically surrounded by an outer cylindrical body with a gap therebetween, the inner cylindrical body including an axially central portion being completely diametrically solid and positioned such that its cylindrical axis extends from the first component, to the second component and having opposed end faces in confronting relation with and physically contacting and terminating at an exterior of each of the first and second components, respectively, each said opposed end face including a radial surface,
- the outer cylindrical body having opposed ends, only one of the ends radially coupled to the inner cylindrical body by a flange extending circumferentially around the inner cylindrical body.
An insulator for insulating a first component maintained at a high electric potential from a second component desirably maintained at ground in an ionic gaseous environment, the insulator comprising an inner cylindrical body interposed between the first and second components and oriented such that its cylindrical axis extends from the first component to the second component, the inner cylindrical body concentrically surrounded by an outer cylindrical body with a gap therebetween and the outer cylindrical body having opposed ends, one of the ends radially coupled to the inner cylindrical body by a flange extending circumferentially around the inner cylindrical body,
- wherein the inner cylindrical body includes an axially central portion being completely diametrically solid and opposed end faces that include a radial surface facing, contacting and terminating at an exterior of a respective one of the first and second components.
Dependencies are inferred from the claim text.