Photovoltaic device and method of manufacturing the same
AssigneeSanyo Electric Co., Ltd.
InventorAkira Terakawa
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Abstract
A photovoltaic device capable of improving an output characteristic is obtained. This photovoltaic device includes a first conductivity type crystalline silicon region, a second conductivity type first noncrystalline silicon layer and a substantially intrinsic second noncrystalline silicon layer arranged between the crystalline silicon region and the first noncrystalline silicon layer, and the crystalline silicon region has an aperiodic corrugated shape having a height of not more than 2 nm on the interface between the same and the second noncrystalline silicon layer.
Claims20
A photovoltaic device comprising:
- a first conductivity type crystalline silicon region;
- a second conductivity type first noncrystalline silicon layer;
- and
- a substantially intrinsic second noncrystalline silicon layer arranged between said crystalline silicon region and said first noncrystalline silicon layer, wherein
- said crystalline silicon region has a smooth aperiodic corrugated shape having a height of not more than 2 nm on the interface between said crystalline silicon region and said second noncrystalline silicon layer.
A method of manufacturing a photovoltaic device, comprising steps of:
- forming a first conductivity type crystalline silicon region provided with a plurality of terraces exposing (111) planes on the surfaces thereof and a step connecting adjacent said terraces with each other;
- forming a substantially intrinsic first noncrystalline silicon layer on said crystalline silicon region;
- and
- forming a second conductivity type second noncrystalline silicon layer on said first noncrystalline silicon layer, wherein
- said step of forming said first noncrystalline silicon layer includes a step of forming a smooth aperiodic corrugated shape having a height of not more than 2 nm on the interface between said crystalline silicon region and said first noncrystalline silicon layer.
Dependencies are inferred from the claim text.