Crystallization apparatus, crystallization method, device and phase modulation element

A crystallization method comprising:

• illuminating with an incident light beam a light modulation optical system which has an element having a combined pattern obtained from a first pattern forming a light intensity distribution of a V-shaped light intensity gradient distribution with the minimum oriented along a Y direction to implement crystal growth in a lateral direction along a light intensity gradient from a crystal core and a second pattern forming a light intensity minimum distribution with an inverse peak shape with the minimum oriented along a X direction to position a first occurrence of solidification on an irradiated surface at a position where light intensity of the V shaped light intensity gradient distribution and the light intensity minimum distribution with an inverse peak shape are both at a minimum intensity,
• said first pattern comprising at least one row of cells including a first phase-modulation area and a second phase-modulation area where a size of the first phase-modulation area varies along the row and decreases said light intensity toward the position where the light intensity is minimum;
• and
• irradiating a polycrystalline semiconductor film or an amorphous semiconductor film with the incident light beam having a light intensity distribution with which a light intensity distribution pattern is generated by the first pattern and the second pattern, in an irradiated surface to melt an irradiated region through an image formation optical system provided between the light modulation optical system and a substrate having the film, thereby crystallizing the polycrystalline semiconductor film or the amorphous semiconductor film, such that a position corresponding to an irradiation position where light intensity of the light intensity distribution is lowest is first solidified when incidence of the light beam is interrupted, and the solidification position is moved and crystallized along the V-shaped light intensity gradient distribution.