Film pattern forming method, device, electro-optical apparatus, and electronic appliance
AssigneeSeiko Epson Corporation
InventorsToshimitsu Hirai, Katsuyuki Moriya
Life of this patent
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Abstract
A method for forming a film pattern by disposing a functional fluid on a substrate, includes: forming a partition wall that includes a first opening that corresponds to a first film pattern and a second opening that corresponds to a second film pattern; and disposing a droplet of the functional fluid into the first opening, so that the functional fluid is disposed into the second opening by a self-flow of the functional fluid; wherein: the first film pattern is linear; the second film pattern is narrower than the first film pattern, and is connected to the first film pattern at a rear edge thereof; and a front edge of the second film pattern has a missing part in which a corner of a rectangular contour is missing.
Claims4
A method for forming a film pattern comprising:
- forming partition walls on a substrate, the partition walls defining a linear first film pattern having a first width and a plurality of second film patterns that each extend perpendicular to the first film pattern in plan view and each have a second width;
- disposing a functional fluid on the substrate between the partition walls that define the first film pattern to form the first film pattern;
- and
- flowing the functional fluid along the substrate from the first film pattern to regions between the partition walls that form the second film pattern,
- wherein the second widths of the second film patterns are less than the first width of the first film pattern;
- the second film patterns are each connected to the first film pattern at a rear edge thereof that is located proximate the first film pattern;
- and
- front edges of the second film patterns are located distal to the first film pattern, and each front edge has a missing part in which a corner of a rectangular contour is missing such that the missing part of each front edge is located distal from the first film pattern.
Dependencies are inferred from the claim text.