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US 7,803,514 B2Granted
Photosensitive composition, microfabrication method using the same, and microfabricated structure thereof
AssigneeSamsung Electronics Co., Ltd.
InventorJong Jin Park
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Abstract
Disclosed herein may be a photosensitive composition, a microfabricated structure including the same, a device including the microfabricated structure, and methods of fabricating the microfabricated structure and the device. The photosensitive composition, including a multifunctional photosensitive resin, a two-photon photosensitizer, an organic solvent, and a silver compound, may be subjected to two- or three-dimensional microfabrication, thus realizing the microfabricated structure containing silver nanoparticles.
Claims15
A photosensitive composition, comprising:
- a multifunctional photosensitive resin;
- a two-photon photosensitizer;
- an organic solvent;
- and
- a silver compound.
2 more elements
Dependencies are inferred from the claim text.