Technique for separating a mold from solidified imprinting material

A method for separating a mold, included in a template, from solidified imprinting material disposed on a substrate, said template including a first side disposed opposite to said mold, said method comprising:

• pressurizing a chamber positioned adjacent to said first side of said template such that pressure is applied directly to said first side of said template to create a deformation in said template proximate to said mold, wherein deformation of said template is at a region of said template that surrounds said mold, applied pressure sufficient to create a returning force that is greater than an adhesion force between said solidified imprinting material and said mold;
• and
• separating regions of said mold from said formation that are spaced-apart from a perimeter of said mold.

A method for separating a mold, included in a template, from solidified imprinting material disposed on a substrate, said template including a first side disposed opposite to said mold, said method comprising:

• separating said mold from said solidified imprinting material by pressurizing a chamber positioned adjacent to said first side of said template such that pressure is applied directly to said first side of said template to create undulations—in a region of said template that surrounds said mold and creating a space between said mold and said solidified imprinting material.