Method and apparatus for manufacturing plate-like structure
AssigneeKabushiki Kaisha Toshiba
InventorsRyoichi Takahashi, Masatoshi Sakurai
Life of this patent
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Abstract
A method for manufacturing a plate-like structure, the method including a step of transferring concave and convex patterns on a master to a surface of a transferred substrate by sandwiching the master provided with the concave and convex patterns and the transferred substrate, between a press surface of a hollow cylindrical upper and a press surface of a lower mold, and pressurizing central parts of the upper and lower molds to apply pressure to the master and the transferred substrate, wherein a compressive load imposed on inner peripheral portions of the upper and lower molds is blocked and distributed toward outer peripheries of the upper and lower molds.
Claims4
A method for manufacturing a plate-like structure, the method comprising:
- a step of transferring concave and convex patterns on a master to a surface of a transferred substrate by sandwiching the master provided with the concave and convex patterns and the transferred substrate, between a press surface of a hollow cylindrical upper mold and a press surface of a hollow cylindrical lower mold, and pressurizing central parts of the upper and lower molds to apply pressure to the master and the transferred substrate, wherein
- a compressive load imposed on inner peripheral portions of the upper and lower molds is blocked and distributed toward outer peripheries of the upper and lower molds, and
- at least one of the press surfaces of the upper and lower molds includes
- a buffer layer which is expanded or contracted in a direction parallel to the press surface by the pressure applied by the upper and lower molds, to absorb deformation of the master and transferred substrate;
- and
- a plate member provided on a surface of the buffer layer, which plate member is adjacent to the master or the transferred substrate, the plate member being deformed by the pressure received via the buffer layer, so as to follow the shape of the master or transferred substrate.
A method for manufacturing a plate-like structure, the method comprising:
- a step of transferring concave and convex patterns on a master to a surface of a transferred substrate by sandwiching the master provided with the concave and convex patterns and the transferred substrate, between a press surface of an upper mold and a press surface of a lower mold, and applying pressure to the master and the transferred substrate, wherein
- a compressive load imposed on outer peripheral portions of the upper and lower molds is distributed toward central axes of the upper and lower molds, and
- at least one of the press surfaces of the upper and lower molds includes
- a buffer layer which is expanded or contracted in a direction parallel to the press surface by the pressure applied by the upper and lower molds, to absorb deformation of the master and transferred substrate;
- and
- a plate member provided on a surface of the buffer layer, which plate member is adjacent to the master or the transferred substrate, the plate member being deformed by the pressure received via the buffer layer, so as to follow the shape of the master or transferred substrate.
Dependencies are inferred from the claim text.