Substrate edge part cleaning apparatus and substrate edge part cleaning method

A substrate edge part cleaning method performed by a substrate edge part cleaning apparatus including a substrate holding unit, which holds a substrate for display, a cleaning head, which cleans an edge part of the substrate by wiping the edge part of the substrate while moving rectilinearly, and a camera, which moves together with the cleaning head, captures an image of a proximity of the edge of a color filter placed on the substrate, and obtains surface status information of the substrate, said substrate edge part cleaning method comprising:

• detecting a position of the edge of the color filter based on the surface status information obtained by the camera;
• detecting a position of two corners of the color filter by moving the cleaning head rectilinearly without performing a cleaning operation;
• recognizing position information of a whole edge of the color filter;
• recognizing a positional relationship between the edge of the color filter and a location of the cleaning head based on the detected position of the edge of the color filter;
• and
• adjusting a position of the substrate by causing the substrate holding unit to adjust the position of the substrate based on (a) the recognized position information of the whole edge of the color filter and (b) the recognized positional relationship between the edge of the color filter and the location of the cleaning head.