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US 7,802,978 B2Granted
Imprinting of partial fields at the edge of the wafer
AssigneeMolecular Imprints, Inc.
InventorsSidlgata V. Sreenivasan, Byung-Jin Choi
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Abstract
The present invention is directed towards several aspects of imprint lithography that have to be improved to address imprinting of partial fields and dies at the edge of the wafer.
Claims4
An imprint lithography system comprising a wafer;
- an adhesion promoter deposited on the wafer without a raised bead at its edge near an edge of the wafer;
- and
- an imprint lithography template spaced apart from the wafer to be lowered towards the wafer in order to imprint a pattern in an imprint material deposited on the adhesion promoter;
- and,
- a force control system configured to provide asymmetrical forces altering a center of pressure of the imprint lithography template to the center of pressure of the imprint material deposited on the adhesion promoter.
2 more elements
Dependencies are inferred from the claim text.