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US 7,802,891 B2Granted
Faceted mirror apparatus
AssigneeCarl Zeiss SMT GmbH
InventorsAndreas Seifert, Markus Weiss, Andreas Heisler, Stefan Dornheim
Life of this patent
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Abstract
A faceted mirror apparatus includes a support plate having a plurality of stepped reception bores into which are fitted the base portions of respective ones of a plurality of mirror facets having mirrored surfaces. An outer surface of each of the facets bears on an inner wall to provide a stable alignment of the optical axes of the mirrored surfaces such that the apparatus generates a beam of rays from impinging rays.
Claims58
A faceted mirror apparatus, comprising:
- a faceted mirror having a plurality of mirror facets which reflect impinging rays in order to generate a beam of rays, wherein each of the mirror facets has a mirror surface with an optical axis, and the mirror facets are each fitted into reception bores of a support plate so that the optical axes of the mirror surfaces are respectively aligned in order to generate the beam of rays, each of the facets having an outer surface which bears directly on the inner wall of the reception bore to provide a stable alignment of the facet within the reception bore, wherein the mirror facets each have a cylindrical mirror facet head with a mirror surface and a cylindrical mirror facet base, and they are fitted into stepped reception bores of the support plate with a step ledge.
A faceted mirror apparatus, comprising:
- a faceted mirror having a plurality of mirror facets which reflect impinging rays in order to generate a beam of rays, wherein each of the mirror facets has a mirror surface with an optical axis, and the mirror facets are each fitted into reception bores of a support plate so that the optical axes of the mirror surfaces are respectively aligned in order to generate the beam of rays, each of the facets having an outer surface which bears directly on the inner wall of the reception bore to provide stable alignment of the facet within the reception bore, wherein the mirror facets are reprocessed on their back faces, remote from the mirror surfaces, with which they respectively bear on the step ledge of the reception bore.
A faceted mirror apparatus, comprising:
- a faceted mirror having a plurality of mirror facets which reflect impinging rays in order to generate a beam of rays, wherein each of the mirror facets has a mirror surface with an optical axis, and the mirror facets are each fitted into reception bores of a support plate so that the optical axes of the mirror surfaces are respectively aligned in order to generate the beam of rays, each of the facets having an outer surface which bears directly on the inner wall of the reception bore to provide stable alignment of the facet within the reception bore, the mirror facets each having a conical mirror facet head, with a mirror surface, and a cylindrical mirror facet base, the mirror facets being received in reception bores of the support plate with correspondingly matched conical and cylindrical shapes.
A faceted mirror apparatus, comprising:
- a faceted mirror having a plurality of mirror facets which reflect impinging rays in order to generate a beam of rays, wherein each of the mirror facets has a mirror surface with an optical axis, and the mirror facets are each fitted into reception bores of a support plate so that the optical axes of the mirror surfaces are respectively aligned in order to generate the beam of rays, each of the facets having an outer surface which bears directly on the inner wall of the reception bore to provide stable alignment of the facet within the reception bore, the mirror facets of the support plate having reprocessing faces for alignment of at least one mirror surface, said apparatus further comprising:
- an illumination instrument optically coupled to the faceted mirror to provide illumination incident upon the faceted mirror,
- a microlithography projection objective optically coupled to the faceted mirror to provide illumination incident upon the faceted mirror, and
- a microlithography projection objective optically coupled to the faceted mirror to project an image formed using the beam of rays generated by the faceted mirror.
1 more element
A faceted mirror apparatus, comprising:
- a faceted mirror having a plurality of mirror facets which reflect impinging rays in order to generate a beam of rays, wherein each of the mirror facets has a mirror surface with an optical axis, and the mirror facets are each fitted into reception bores of a support plate so that the optical axes of the mirror surfaces are respectively aligned in order to generate the beam of rays, the reception bores having a step ledge, each of the facets having an outer surface which bears directly on the inner wall of the reception bore to provide a stable alignment of the facet within the reception bore;
- an illumination instrument optically coupled to the faceted mirror to provide illumination impinging on the faceted mirror, and
- a microlithography projection objective optically coupled to the faceted mirror to project an image formed using the beam of rays generated by the faceted mirror, the mirror facets each having a cylindrical mirror facet head, with a mirror surface, and a cylindrical mirror facet base, the mirror facets being fitted into stepped reception bores of the support plate with a step ledge.
A faceted mirror apparatus, comprising:
- a faceted mirror having a plurality of mirror facets which reflect impinging rays in order to generate a beam of rays, wherein each of the mirror facets has a mirror surface with an optical axis, and the mirror facets are each fitted into reception bores of a support plate so that the optical axes of the mirror surfaces are respectively aligned in order to generate the beam of rays, each of the facets having an outer surface which bears directly on the inner wall of the reception bore to provide a stable alignment of the facet within the reception bore;
- an illumination instrument optically coupled to the faceted mirror to provide illumination impinging on the faceted mirror, and
- a microlithography projection objective optically coupled to the faceted mirror to project an image formed using the beam of rays generated by the faceted mirror, the mirror facets each having a conical mirror facet head with a mirror surface and a cylindrical mirror facet base, the mirror facets being received in reception bores of the support plate with correspondingly matched conical and cylindrical shapes.
A facetted mirror having a plurality of mirror facets which generate a beam of rays, wherein each of the mirror facets has a mirror surface with an optical axis, and the mirror facets are each fitted to a support plate so that the optical axes of the mirror surfaces are respectively aligned in order to generate the beam of rays, the mirror facets or the support plate having reprocessing faces for the alignment of at least one mirror surface.
A facetted mirror for generating an intended beam of rays from impinging rays, said facetted mirror, comprising:
- a support plate, and
- a plurality of mirror facets mounted to said support plate, each respective one of said mirror facets having a respective mirror surface with an optical axis, each respective optical axis lying in a set direction relative to said support plate such that, acting together, said mirror facets generate the intended beam of rays by reflecting the impinging rays from each respective one of said mirror surfaces in a respective predetermined direction, said facetted mirror having at least one reprocessing face, said at least one reprocessing face being located on at least one of (i) said mirror facet and (ii) said support plate;
- said at least one said reprocessing face being a reprocessing face which has been reprocessed to align at least one of said optical axes with said set direction.
Dependencies are inferred from the claim text.