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US 7,802,482 B2Granted
Diaphragm attaching structure of electrostatic capacity type pressure gauge
AssigneeHORIBA STEC, Co., Ltd.
InventorToru Ikeda
Life of this patent
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AssigneeHORIBA STEC, Co., Ltd.
InventorToru Ikeda
Estimating the term…
The present invention provides a diaphragm attaching structure of an electrostatic capacity type pressure gauge which can achieve an improvement of a measuring precision by inhibiting a poor weld and a heat strain from being generated while restricting an increase of a cost with an easy manufacturing. The present invention is a diaphragm attaching structure of an electrostatic capacity type pressure gauge in which a diaphragm for receiving a fluid pressure is provided in a tensional manner on one end of a tubular case, and a fixed side electrode for picking up a deflection displacement of the diaphragm as a change of an electric capacity is provided within the tubular case on a side opposite to a pressure receiving surface of the diaphragm, wherein an outer peripheral edge portion of the diaphragm is formed thicker than a center portion thereof, and the thick outer peripheral edge portion is thermally molten to be welded and firmly attached to an end surface portion around the opening on the one end of the tubular case.
A diaphragm attaching structure of an electrostatic capacity type pressure gauge, in which a metal diaphragm for receiving a fluid pressure is provided in a tensional manner on one end of a metal tubular case, and a fixed side electrode for picking up a deflection displacement of the diaphragm as a change of an electric capacity is provided within the tubular case on a side opposite to a pressure receiving surface of the diaphragm, wherein an outer peripheral edge portion of the diaphragm is annular and formed thicker than a center portion thereof, and the thick outer peripheral edge portion and adjacent one end of the metal tubular case is thermally molten to form a weldment to firmly attached an end surface portion around the opening on the one end of the tubular case to the diaphragm.
In an electrostatic capacity pressure gauge, having a hollow metal casing for operative attachment to a source of fluid, the improvement comprising:
In an electrostatic capacity pressure gauge for measuring a fluid pressure having a hollow method casing with a fixed electrode mounted in the hollow mold casing and a metal diaphragm secured to the hollow metal casing so that one side of the metal diaphragm is adjacent the fixed electrode and the other side of the metal diaphragm is in contact with the fluid and subject to a deflectional displacement by the fluid pressure which the fixed electrode can perk up as a change of an electric capacity representative of the fluid pressure, the improvement comprising:
Dependencies are inferred from the claim text.