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US 7,802,473 B2Granted
Angular velocity sensor
AssigneeTamagawa Seiki Kabushiki Kaisha
InventorsYuki Endo, Hiroshi Tanaka, Tomoaki Momose, Masanori Yachi
Life of this patent
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Abstract
An angular velocity sensor includes a tuning-fork oscillator that includes a base portion, arm portions extending from the base portion, and a pair of driving electrodes that are provided to extend from the front face and the back face to a side face of at least one of the arm portions.
Claims7
An angular velocity sensor comprising:
- a tuning-fork oscillator that includes a base portion, a plurality of arm portions extending from the base portion, a pair of driving electrodes, and sensing electrodes,
- wherein the pair of driving electrodes are provided on each of two arm portions that have driving oscillations with respect to each other among the plurality of arm portions,
- wherein one of the pair of driving electrodes extends continuously from a front face to a side face in the each of two arm portions and the other of the pair of driving electrodes extends continuously from a back face to the side face in the each of two arm portions,
- wherein the pair of driving electrodes generates electric field between the front face and the back face and from the side face to the side face, and
- wherein the sensing electrodes are provided on the each of two arm portions.
2 more elements
An angular velocity sensor comprising:
- a tuning-fork oscillator that includes a base portion, a plurality of arm portions extending from the base portion, and a pair of driving electrodes,
- wherein the pair of driving electrodes are provided on each of two arm portions that have driving oscillations with respect to each other among the plurality of arm portions,
- wherein one of the pair of driving electrodes extends continuously from a front face to a side face in the each of two arm portions and the other of the pair of driving electrodes extends continuously from a back face to the side face in the each of two arm portions,
- wherein the pair of driving electrodes generates electric field between the front face and the back face and from the side face to the side face,
- wherein two pairs of the driving electrodes are provided on each of the two arm portions, one of the two pairs of the driving electrodes are provided to extend to inner side faces that are side faces of the two arm portions, the inner side faces facing each other and the other one of the two pairs of the driving electrodes are provided to extend to outer side faces that are side faces of the two arm portions, the outer side faces being on the opposite side from the inner side faces facing each other, and
- wherein a driving signal is applied to each driving electrode of the two pairs of the driving electrodes provided on each of the two arm portions, so that electric fields generated on the sides of the inner side faces of the two arm portions are directed in the same direction, electric fields generated on the sides of outer side faces of the two arm portions are directed in the same direction, and the electric fields on the sides of inner side faces are directed in the opposite direction from the direction in which the electric fields on the sides of the outer side faces are directed.
3 more elements
Dependencies are inferred from the claim text.