US 7,800,082 B2 · Electromagnet with active field containment

Abstract

An electromagnet and related ion implanter system including active field containment are disclosed. The electromagnet provides a dipole magnetic field within a tall, large gap with minimum distortion and degradation of strength. In one embodiment, an electromagnet for modifying an ion beam includes: a ferromagnetic box structure including six sides; an opening in each of a first side and a second opposing side of the ferromagnetic box structure for passage of the ion beam therethrough; and a plurality of current-carrying wires having a path along an inner surface of the ferromagnetic box structure, the inner surface including the first side and the second opposing side and a third side and a fourth opposing side, wherein the plurality of current-carrying wires are positioned to pass around each of the openings of the first and second opposing sides.

Claims25

Dependent claims

An electromagnet for modifying an ion beam, the electromagnet comprising:

a ferromagnetic box structure including a plurality of sides, each side having an outer surface and an inner surface opposite to the outer surface;
an opening in each of a first side and a second opposing side of the plurality of sides of the ferromagnetic box structure for passage of the ion beam therethrough;
and
a plurality of current-carrying wires being disposed on the inner surface of the first and second opposing sides and having a first portion substantially parallel to a path of the ion beam and a second portion positioned to pass around each of the openings,
wherein the plurality of current-carrying wires are absent from the outer surface of the first and second opposing sides of the ferromagnetic box structure.

2 more elements

Dependencies are inferred from the claim text.

Electromagnet with active field containment

Life of this patent

Electromagnet with active field containment

Life of this patent

Abstract

Claims25