Film
AssigneeFUJIFILM Corporation
InventorsMakoto Muramatsu, Akira Asano, Kensuke Morita
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Abstract
A file is formed by coating a substrate with a film-forming composition including a compound having an alicyclic hydrocarbon structure and irradiating the coated composition with microwaves having a frequency of 5.8 GHz. An insulating film is formed by irradiating a film including a compound having a siloxane structure with microwave having a frequency of 5.8 GHz. These films possess excellent film properties such as dielectric constant and mechanical strength.
Claims4
An insulating film which is formed by a process comprising the step of irradiating a film comprised of a silsesquioxane compound with microwaves having a frequency of 5.8 GHz.
Dependencies are inferred from the claim text.