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US 7,794,797 B2Granted
Synthesis of carbon nanotubes by selectively heating catalyst
AssigneeCFD Research Corporation
InventorAleksey V. Vasenkov
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Abstract
The present invention is a catalytic chemical vapor deposition method and apparatus for synthesizing carbon nanotubes and/or carbon nanofibers (CNTs) on a substrate by selectively heating a catalyst for CNT synthesis on or near the surface of the substrate. Selective heating of the catalyst is achieved using an exothermic oxidation reaction on the surface of the catalyst. Selective heating of the catalyst prevents heating of the substrate and enables the synthesis of CNTs on temperature sensitive substrates.
Claims5
A method for synthesizing carbon nanotubes on a substrate comprising the steps of:
- a) providing a substrate, said substrate comprising nanoparticles distributed on the surface of said substrate,
- b) placing the substrate in a chemical vapor deposition chamber,
- c) simultaneously delivering gaseous hydrocarbon and oxygen to the nanoparticles using a catalytic chemical vapor deposition process, and
- d) selectively heating the nanoparticles to a higher temperature than the substrate by causing an exothermic oxidation reaction to occur on the surface of the nanoparticles such that the temperature on the surface of the nanoparticles is at least 500° C. to thereby synthesize carbon nanotubes or carbon nanofilaments wherein:
- the nanoparticles distributed on said substrate consist of a material selected from the group consisting of Ni, Fe, Co, Cu, Al, V, Y, Mo, Pt, Pd and combinations thereof and
- the temperature of the substrate does not exceed 220° C.
3 more elements
Dependencies are inferred from the claim text.